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Study of chemical cleaning of surfaces by LEIS method
Staněk, Jan ; Polčák, Josef (referee) ; Bábor, Petr (advisor)
This thesis deal with studying chemical etched surfaces of cadmium telluride crystals (CdTe crystals) by low-energy ion scattering spectroscopy (LEIS method). In the theoretical part, there is description of physical essence of LEIS method, including experimental arrangement of Qtac100 instrument, on which the experiment is measured. The LEIS method is also compared with X-ray photoelectron spectroscopy (XPS). There is summary of properties and structure of CdTe crystals including principle of X-ray detectors, which are the primary use of the crystals. In experimental part there is a description of measuring process, starting with a calibration measurement, ongoing with a chemical etching and ending with a surface analysis. There are examples of LEIS spectra with comments and interpretation including comparison with XPS data.
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Quantitative analysis of matrix elements using SIMS and LEIS methods
Staněk, Jan ; Šik, Ondřej (referee) ; Bábor, Petr (advisor)
This thesis studies comparison and connection of two spectrometric methods – low energy ion scattering spektrometry (LEIS) and secondary ion mass spectrometry (SIMS). SIMS method, despite its many positive qualities, suffers of so called matrix effect, which makes quantifiaction of data very difficult. LEIS method on the other hand is immune to this effect and so it’s suitable completion of SIMS method. As a convenient sample have been chosen AlGaN samples with various concentration of gallium and aluminium. In the first part of thesis is introduced physical essence of SIMS and LEIS method, experimental details and studied samples. In second part of the thesis there’s a description of measurements and comparison of data gained by each method.
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Quantitative analysis of matrix elements using SIMS and LEIS methods
Staněk, Jan ; Šik, Ondřej (referee) ; Bábor, Petr (advisor)
This thesis studies comparison and connection of two spectrometric methods – low energy ion scattering spektrometry (LEIS) and secondary ion mass spectrometry (SIMS). SIMS method, despite its many positive qualities, suffers of so called matrix effect, which makes quantifiaction of data very difficult. LEIS method on the other hand is immune to this effect and so it’s suitable completion of SIMS method. As a convenient sample have been chosen AlGaN samples with various concentration of gallium and aluminium. In the first part of thesis is introduced physical essence of SIMS and LEIS method, experimental details and studied samples. In second part of the thesis there’s a description of measurements and comparison of data gained by each method.
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Study of chemical cleaning of surfaces by LEIS method
Staněk, Jan ; Polčák, Josef (referee) ; Bábor, Petr (advisor)
This thesis deal with studying chemical etched surfaces of cadmium telluride crystals (CdTe crystals) by low-energy ion scattering spectroscopy (LEIS method). In the theoretical part, there is description of physical essence of LEIS method, including experimental arrangement of Qtac100 instrument, on which the experiment is measured. The LEIS method is also compared with X-ray photoelectron spectroscopy (XPS). There is summary of properties and structure of CdTe crystals including principle of X-ray detectors, which are the primary use of the crystals. In experimental part there is a description of measuring process, starting with a calibration measurement, ongoing with a chemical etching and ending with a surface analysis. There are examples of LEIS spectra with comments and interpretation including comparison with XPS data.
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